PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

Description

G03F encompasses photomechanical and photolithographic processes for creating textured or patterned surfaces on substrates, with primary applications in printing plate production and semiconductor device manufacturing. The classification covers photoresists and light-sensitive materials, exposure techniques, development processes, and specialized apparatus used in pattern transfer. It includes origination materials (photographic originals, masks, and reticles) and substrates for pattern creation. Adjacent classes exclude general photographic processes (G03C), electrography (G03G), and the subsequent etching or ion-beam processing steps that follow pattern definition.

5 direct subcodes

Child Classifications

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G03F 1/00 Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
G03F 3/00 Colour separation; Correction of tonal value (photographic copying apparatus in general G03B)
G03F 5/00 Screening processes; Screens therefor
G03F 7/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K)
G03F 9/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically (G03F7/22 takes precedence; preparation of photographic masks G03F1/00; within photographic printing apparatus for making copies G03B27/00)