G03F 1/62 Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
Introduced: January 2012
Title
Titles differ between systems:
IPC: Pellicles or pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
CPC: Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
Full Title
Full titles differ between systems:
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Pellicles or pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
IPC and CPC are identically structured here. All 1 subcodes exist in both systems.
1 shared codes have differing titles between IPC and CPC.
IPC defines codes here since 2012.
Child Classifications
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- G03F 1/64 characterised by the frames, e.g. structure or material, including bonding means therefor since 2012 IPC+CPC Available in IPC and CPC