CPC Subgroup
G03F 7/20 Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00)
Full Title
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K) > Exposure; Apparatus therefor (photographic printing apparatus for making copies G03B27/00)
11 direct subcodes
Child Classifications
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- G03F 7/213 Exposing with the same light pattern different positions of the same surface at the same time
- G03F 7/22 Exposing sequentially with the same light pattern different positions of the same surface
- G03F 7/24 Curved surfaces