CPC Subgroup Additional Only
H01J 2237/06 Sources
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources
5 direct subcodes
Child Classifications
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- H01J 2237/061 Construction
- H01J 2237/063 Electron sources
- H01J 2237/065 Source emittance characteristics
- H01J 2237/08 Ion sources
- H01J 2237/083 Beam forming