CPC Subgroup Additional Only
H01J 2237/08 Ion sources
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources
5 direct subcodes
Child Classifications
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- H01J 2237/0802 Field ionization sources
- H01J 2237/081 Sputtering sources
- H01J 2237/0812 Ionized cluster beam [ICB] sources
- H01J 2237/0815 Methods of ionisation
- H01J 2237/0822 Multiple sources