CPC Subgroup Additional Only
H01J 2237/0805 Liquid metal sources
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Field ionization sources > Liquid metal sources
H01J 2237/0805 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Field ionization sources > Liquid metal sources