CPC Subgroup Additional Only
H01J 2237/0802 Field ionization sources
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Field ionization sources
2 direct subcodes
Child Classifications
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- H01J 2237/0805 Liquid metal sources
- H01J 2237/0807 Gas field ion sources [GFIS]