CPC Subgroup Additional Only
H01J 2237/153 Correcting image defects, e.g. stigmators
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Correcting image defects, e.g. stigmators
4 direct subcodes
Child Classifications
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- H01J 2237/1532 Astigmatism
- H01J 2237/1534 Aberrations
- H01J 2237/1536 Image distortions due to scanning
- H01J 2237/1538 Space charge (Boersch) effect compensation