CPC Subgroup Additional Only
H01J 2237/1532 Astigmatism
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Correcting image defects, e.g. stigmators > Astigmatism
H01J 2237/1532 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Correcting image defects, e.g. stigmators > Astigmatism