CPC Subgroup Additional Only
H01J 2237/1534 Aberrations
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Correcting image defects, e.g. stigmators > Aberrations
H01J 2237/1534 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Correcting image defects, e.g. stigmators > Aberrations