CPC Subgroup Additional Only
H01J 2237/16 Vessels
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Vessels
3 direct subcodes
Child Classifications
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- H01J 2237/162 Open vessel, i.e. one end sealed by object or workpiece
- H01J 2237/164 Particle-permeable windows
- H01J 2237/166 Sealing means