Beam diagnostics including control of the parameter or property diagnosed (H01J2237/30472 takes precedence)

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Detection characterised by the variable being measured > Intensity, dose or other characteristics of particle beams or electromagnetic radiation > Beam diagnostics including control of the parameter or property diagnosed (H01J2237/30472 takes precedence)

Child Classifications

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• H01J 2237/24521 Beam diameter
• H01J 2237/24528 Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
• H01J 2237/24535 Beam current
• H01J 2237/24542 Beam profile