Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece

Full Title

Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Detection characterised by the variable being measured > Intensity, dose or other characteristics of particle beams or electromagnetic radiation > Beam diagnostics including control of the parameter or property diagnosed (H01J2237/30472 takes precedence) > Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece