CPC Subgroup Additional Only
H01J 2237/2809 characterised by the imaging problems involved
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion microscopes > Scanning microscopes > characterised by the imaging problems involved
2 direct subcodes
Child Classifications
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- H01J 2237/281 Bottom of trenches or holes
- H01J 2237/2811 Large objects