CPC Subgroup Additional Only
H01J 2237/282 Determination of microscope properties
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion microscopes > Determination of microscope properties
2 direct subcodes
Child Classifications
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- H01J 2237/2823 Resolution
- H01J 2237/2826 Calibration