Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement > Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields