External mechanical adjustment of electron or ion optical components (H01J37/067, H01J37/20 take precedence)

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement > Arrangements for directing or deflecting the discharge along a desired path ( lenses H01J37/10) > External mechanical adjustment of electron or ion optical components (H01J37/067, H01J37/20 take precedence)