Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support