by sol-gel deposition

Full Title

Piezoelectric or electrostrictive devices (integrated devices or assemblies of multiple devices H10N39/00) > Manufacture or treatment > Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base > by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing > by liquid phase deposition > by sol-gel deposition