using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]

Full Title

Handling or holding of wafers, substrates or devices during manufacture or treatment thereof > using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]

Child Classifications

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• H10P 72/12
• H10P 72/13
• H10P 72/14
• H10P 72/15
• H10P 72/16
• H10P 72/17
• H10P 72/18
• H10P 72/19