using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]

Introduced: January 2026

Full Title

Handling or holding of wafers, substrates or devices during manufacture or treatment thereof > using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]

Of 8 combined children, 0 exist in both systems.

8 codes are CPC-only extensions.

Child Classifications

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H10P 72/12 +2 CPC CPC only CPC only
H10P 72/13 +1 CPC CPC only CPC only
H10P 72/14 +1 CPC CPC only CPC only
H10P 72/15 +1 CPC CPC only CPC only
H10P 72/16 +1 CPC CPC only CPC only
H10P 72/17 +1 CPC CPC only CPC only
H10P 72/18 CPC only CPC only
H10P 72/19 +11 CPC CPC only CPC only