using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]

Full Title

Handling or holding of wafers, substrates or devices during manufacture or treatment thereof > using carriers specially adapted therefor, e.g. front opening unified pods [FOUP]

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS