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DIFF Subgroup
C30B 25/14

Feed and outlet means for the gases; Modifying the flow of the reactive gases

Introduced: January 1980

Full Title

Full titles differ between systems:

IPC:

Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth > Epitaxial-layer growth > Feed and outlet means for the gases; Modifying the flow of the reactive gases

CPC:

Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth > Feed and outlet means for the gases; Modifying the flow of the reactive gases

No child classifications to compare. This is a leaf node in both IPC and CPC.