G03F 1/50 Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Introduced: January 2012
Title
Titles differ between systems:
IPC: Mask blanks not covered by groups; Preparation thereof
CPC: Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Full Title
Full titles differ between systems:
Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Mask blanks not covered by groups; Preparation thereof
Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
No child classifications to compare. This is a leaf node in both IPC and CPC.