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PCE
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DIFF Subgroup
G03F 1/38

Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof

Introduced: January 2012

Full Title

Full titles differ between systems:

IPC:

Originals for photomechanical production of textured or patterned surfaces, e.g. masks, photo-masks or reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof

CPC:

Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof > Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof

IPC and CPC are identically structured here. All 5 subcodes exist in both systems.

IPC defines codes here since 2012.

Child Classifications

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  • G03F 1/40 Electrostatic discharge [ESD] related features, e.g. antistatic coatings or a conductive metal layer around the periphery of the mask substrate since 2012 IPC+CPC Available in IPC and CPC
  • G03F 1/42 Alignment or registration features, e.g. alignment marks on the mask substrates since 2012 IPC+CPC Available in IPC and CPC
  • G03F 1/44 Testing or measuring features, e.g. grid patterns, focus monitors, sawtooth scales or notched scales since 2012 IPC+CPC Available in IPC and CPC
  • G03F 1/46 Antireflective coatings since 2012 IPC+CPC Available in IPC and CPC
  • G03F 1/48 Protective coatings since 2012 IPC+CPC Available in IPC and CPC

Top Applicants

Top Applicants (IPC)

Class G03,2013–2023, worldwide · Source: EPO PATSTAT

  1. CANON 31,416
  2. CANON JP 17,469
  3. KYOCERA DOCUMENT SOLUTIONS 9,845
  4. RICOH COMPANY 9,807
  5. ASML NETHERLANDS NL 9,427
  6. FUJIFILM JP 7,225
  7. KONICA MINOLTA CORPORATION 7,216
  8. FUJI XEROX COMPANY 5,711
  9. CARL ZEISS SMT DE 4,971
  10. RICOH COMPANY JP 4,123

Top Applicants (CPC)

Class G03,2013–2023, worldwide · Source: EPO PATSTAT

  1. CANON JP 19,215
  2. CANON 12,916
  3. ASML NETHERLANDS NL 10,000
  4. FUJIFILM JP 7,814
  5. SAMSUNG ELECTRONICS COMPANY KR 5,181
  6. CARL ZEISS SMT DE 5,079
  7. RICOH COMPANY JP 4,343
  8. LG INNOTEK COMPANY KR 4,054
  9. KYOCERA DOCUMENT SOLUTIONS 3,812
  10. KYOCERA DOCUMENT SOLUTIONS JP 3,682