DIFF Subgroup
G03F 7/063 Full Title
Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (using photoresist structures for special production processes, see the relevant places, e.g. B44C, H10P76/00, H05K) > Photosensitive materials (G03F7/12, G03F7/14 take precedence) > Silver salts (G03F7/075 takes precedence)
Of 1 combined children, 0 exist in both systems.
1 codes are CPC-only extensions.