characterised by the method of coating

Full Title

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes > characterised by the method of coating

Classification Context

Section:

CHEMISTRY; METALLURGY

Class:

COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL

Subclass:

COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL

Child Classifications

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• C23C 16/442 using fluidised bed processes
• C23C 16/448 characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
• C23C 16/453 passing the reaction gases through burners or torches, e.g. atmospheric pressure CVD
• C23C 16/455 characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber
• C23C 16/458 characterised by the method used for supporting substrates in the reaction chamber
• C23C 16/46 characterised by the method used for heating the substrate
• C23C 16/48 by irradiation, e.g. photolysis, radiolysis, particle radiation
• C23C 16/5 using electric discharges
• C23C 16/52 Controlling or regulating the coating process
• C23C 16/54 Apparatus specially adapted for continuous coating