Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes

Classification Context

Section:

CHEMISTRY; METALLURGY

Class:

COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL

Subclass:

COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL

Related Keywords

Child Classifications

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• C23C 16/01 on temporary substrates, e.g. on substrates subsequently removed by etching
• C23C 16/02 Pretreatment of the material to be coated
• C23C 16/04 Coating on selected surface areas, e.g. using masks
• C23C 16/06 characterised by the deposition of metallic material
• C23C 16/22 characterised by the deposition of inorganic material, other than metallic material
• C23C 16/44 characterised by the method of coating
• C23C 16/56 After-treatment