of conductive or resistive materials

Full Title

Etching of wafers, substrates or parts of devices > Dry etching; Plasma etching; Reactive-ion etching > of conductive or resistive materials

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS