Manufacture or treatment of masks on semiconductor bodies, e.g. by lithography or photolithography

Classification Context

Section:

ELECTRICITY

Class:

SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR

Subclass:

GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS

Child Classifications

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• H10P 76/2 of masks comprising organic materials
• H10P 76/4 of masks comprising inorganic materials