CPC Subgroup
C23C 14/48 Ion implantation
Full Title
Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Ion implantation
C23C 14/48 Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Ion implantation