Sputtering

Full Title

Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material > characterised by the process of coating > Sputtering

Child Classifications

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• C23C 14/3407
• C23C 14/3435
• C23C 14/3457
• C23C 14/3464
• C23C 14/3471
• C23C 14/3485
• C23C 14/3492
• C23C 14/35 by application of a magnetic field, e.g. magnetron sputtering
• C23C 14/46 by ion beam produced by an external ion source