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PCE
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CPC Subgroup
C23C 16/26

Deposition of carbon only

Full Title

Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > characterised by the deposition of inorganic material, other than metallic material > Deposition of carbon only

1 direct subcode

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