CPC Subgroup
C30B 25/04 Pattern deposit, e.g. by using masks
Full Title
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth > Pattern deposit, e.g. by using masks
C30B 25/04 Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth > Pattern deposit, e.g. by using masks