DIFF Subgroup
C30B 25/04 Pattern deposit, e.g. by using masks
Introduced: January 1980
Full Title
Full titles differ between systems:
IPC:
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour deposition growth > Epitaxial-layer growth > Pattern deposit, e.g. by using masks
CPC:
Single-crystal growth by chemical reaction of reactive gases, e.g. chemical vapour-deposition growth > Epitaxial-layer growth > Pattern deposit, e.g. by using masks
No child classifications to compare. This is a leaf node in both IPC and CPC.