CPC Subgroup
C30B 31/10 Reaction chambers; Selection of materials therefor
Full Title
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state > Reaction chambers; Selection of materials therefor
2 direct subcodes
Child Classifications
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Top Applicants
Top 10 applicants by patent filingsfor class C30, 2013–2023, worldwide · Source: EPO PATSTAT
- CHINESE ACADEMY OF SCIENCES 1,052
- SUMCO CORPORATION JP 881
- APPLIED MATERIALS US 871
- SUMITOMO ELECTRIC INDUSTRIES JP 682
- SHIN ETSU HANDOTAI COMPANY JP 649
- SHIN-ETSU CHEMICAL COMPANY JP 506
- SUMCO CORPORATION 500
- SILTRONIC DE 491
- GLOBALWAFERS COMPANY TW 458
- NGK INSULATORS JP 379