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CPC Subgroup
C30B 31/16

Feed and outlet means for the gases; Modifying the flow of the gases

Full Title

Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state > Feed and outlet means for the gases; Modifying the flow of the gases

1 direct subcode

Child Classifications

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Top Applicants

Top 10 applicants by patent filingsfor class C30, 2013–2023, worldwide · Source: EPO PATSTAT

  1. CHINESE ACADEMY OF SCIENCES 1,052
  2. SUMCO CORPORATION JP 881
  3. APPLIED MATERIALS US 871
  4. SUMITOMO ELECTRIC INDUSTRIES JP 682
  5. SHIN ETSU HANDOTAI COMPANY JP 649
  6. SHIN-ETSU CHEMICAL COMPANY JP 506
  7. SUMCO CORPORATION 500
  8. SILTRONIC DE 491
  9. GLOBALWAFERS COMPANY TW 458
  10. NGK INSULATORS JP 379