DIFF Subgroup
C30B 31/16 Feed and outlet means for the gases; Modifying the flow of the gases
Introduced: January 1980
Full Title
Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor > by contacting with diffusion material in the gaseous state > Feed and outlet means for the gases; Modifying the flow of the gases
Of 1 combined children, 0 exist in both systems.
1 codes are CPC-only extensions.
Child Classifications
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