CPC Subgroup Additional Only
H01J 2237/081 Sputtering sources
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Sputtering sources
H01J 2237/081 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Sputtering sources