CPC Subgroup Additional Only
H01J 2237/0812 Ionized cluster beam [ICB] sources
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Ionized cluster beam [ICB] sources
H01J 2237/0812 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Ionized cluster beam [ICB] sources