CPC Subgroup Additional Only
H01J 2237/0817 Microwaves
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Methods of ionisation > Microwaves
H01J 2237/0817 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Methods of ionisation > Microwaves