CPC Subgroup Additional Only
H01J 2237/082 Electron beam
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Methods of ionisation > Electron beam
H01J 2237/082 Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Sources > Ion sources > Methods of ionisation > Electron beam