CPC Subgroup Additional Only
H01J 2237/31761 Patterning strategy
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography > Patterning strategy
4 direct subcodes
Child Classifications
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- H01J 2237/31762 Computer and memory organisation
- H01J 2237/31764 Dividing into sub-patterns
- H01J 2237/31766 Continuous moving of wafer
- H01J 2237/31767 Step and repeat