using particular beams or near-field effects, e.g. STM-like techniques

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Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography > using particular beams or near-field effects, e.g. STM-like techniques

Child Classifications

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• H01J 2237/31754 using electron beams
• H01J 2237/31755 using ion beams
• H01J 2237/31757 hybrid, i.e. charged particles and light, X-rays, plasma
• H01J 2237/31759 using near-field effects, e.g. STM