CPC Subgroup Additional Only
H01J 2237/31781 from patterned cold cathode
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography > by projection > from patterned cold cathode
3 direct subcodes
Child Classifications
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- H01J 2237/31783 M-I-M cathode
- H01J 2237/31784 Semiconductor cathode
- H01J 2237/31786 Field-emitting cathode