CPC Subgroup Additional Only
H01J 2237/31777 by projection
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography > by projection
5 direct subcodes
Child Classifications
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- H01J 2237/31779 from patterned photocathode
- H01J 2237/31781 from patterned cold cathode
- H01J 2237/31788 through mask
- H01J 2237/31789 Reflection mask
- H01J 2237/31791 Scattering mask