CPC Subgroup Additional Only
H01J 2237/31793 Problems associated with lithography
Full Title
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging > Electron or ion beam tubes for processing objects > Processing objects on a microscale > Lithography > Problems associated with lithography
3 direct subcodes
Child Classifications
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- H01J 2237/31794 affecting masks
- H01J 2237/31796 affecting resists
- H01J 2237/31798 detecting pattern defects