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CPC Subgroup
H01J 37/05

Electron or ion-optical arrangements for separating electrons or ions according to their energy (particle separator tubes H01J49/00)

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement > Electron or ion-optical arrangements for separating electrons or ions according to their energy (particle separator tubes H01J49/00)