Electron sources; Electron guns

Full Title

Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof (H01J33/00, H01J40/00, H01J41/00, H01J47/00, H01J49/00 take precedence) > Details > Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement > Electron sources; Electron guns

Child Classifications

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• H01J 37/061
• H01J 37/063 Geometrical arrangement of electrodes for beam-forming
• H01J 37/065 Construction of guns or parts thereof (H01J37/067 - H01J37/077 take precedence)
• H01J 37/067 Replacing parts of guns; Mutual adjustment of electrodes (H01J37/073 - H01J37/077 take precedence; vacuum locks H01J37/18)
• H01J 37/07 Eliminating deleterious effects due to thermal effects or electric or magnetic fields (H01J37/073 - H01J37/077 take precedence)
• H01J 37/073 Electron guns using field emission, photo emission, or secondary emission electron sources
• H01J 37/075 Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
• H01J 37/077 Electron guns using discharge in gases or vapours as electron sources