C23C 16/22 characterised by the deposition of inorganic material, other than metallic material
Introduced: January 1985
Full Title
Full titles differ between systems:
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes > characterised by the deposition of inorganic material, other than metallic material
Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes (reactive sputtering or vacuum evaporation C23C14/00) > characterised by the deposition of inorganic material, other than metallic material
IPC and CPC are identically structured here. All 4 subcodes exist in both systems.
IPC defines codes here since 1985.
Child Classifications
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- C23C 16/28 Deposition of only one other non-metal element since 1985 IPC+CPC Available in IPC and CPC
- C23C 16/30 Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides since 1985 +3 CPC IPC+CPC Available in IPC and CPC